Gigahertz-rate optical modulation on Mach-Zehnder PLZT electro-optic modulators formed on silicon substrates by aerosol deposition
نویسندگان
چکیده
منابع مشابه
Aerosol Deposition on Transparent Electro-Optic Films for Optical Modulators
Complex thin oxide films with electro-optic (EO) properties are promising for use in advanced optical devices because of their large EO effect. We developed a method of aerosol deposition (AD) for fabricating EO films. The mechanism for AD is based on the solidification by impact of submicron particles onto a substrate. Since particles in AD films preserve their crystalline structure during the...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2009
ISSN: 1349-2543
DOI: 10.1587/elex.6.1669